Fabrication of Microelectrodes Using Original “Soft Lithography” Processes

A new type of substrate patterning, known as soft lithography, and more especially microcontact printing (μCP), has been developed by Professor Whitesides’ team. This chapter aims at developing original localized metallization processes for the microfabrication of electrodes to be used in electrochemical biosensors. This technology is applied on polymer or glass substrates. Two original processes using alkanethiol μCP are described in the chapter: the first process consists of a selective peeling of the metal thin‐film areas not protected by the self‐assembled monolayer (SAM), which makes it possible to avoid any chemical etching step in the process. The second process consists of passivating, with the help of a SAM, a gold electroless catalytic coating deposited on the substrate, which makes it possible to trigger localized growth of the metal and to avoid the need for a homogeneous gold thin film deposited using physical vapor deposition (PVD) onto the substrate surface.

Stéphane Cotte (1) , Abdellatif Baraket (1) , François Bessueille (1) , Stéphane Gout (1) , Nourdin Yaakoubi (2) , Didier Léonard (1) , Abdelhamid Errachid (1)

1 ISA - Institut des Sciences Analytiques
2 LAUM - Laboratoire d'Acoustique de l'Université du Mans

Domaines: Micro et nanotechnologies/Microélectronique

Stéphane Cotte, Abdellatif Baraket, François Bessueille, Stéphane Gout, Nourdin Yaakoubi, et al.. Fabrication of Microelectrodes Using Original “Soft Lithography” Processes. New Sensors and Processing Chain, John Wiley & Sons, Inc., pp.1-9, 2014, ⟨10.1002/9781119050612.ch1⟩. ⟨hal-02469445⟩