Accéder directement au contenu Accéder directement à la navigation
Article dans une revue

Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: Analytical and numerical approach in a high frequency range, benchmark solutions

Abstract : Miniaturized vibrating MEMS devices, active (receivers or emitters) or passive devices, and their use for either new applications (hearing, meta-materials, consumer devices, ...) or metrological purposes under non-standard conditions, are involved today in several acoustic domains. More in-depth characterisation than the classical ones available until now are needed. In this context, the paper presents analytical and numerical approaches for describing the behaviour of three kinds of planar micro-beams of rectangular shape (suspended rigid or clamped elastic planar beam) loaded by a backing cavity or a fluid-gap, surrounded by very thin slits, and excited by an incident acoustic field. The analytical approach accounts for the coupling between the vibrating structure and the acoustic field in the backing cavity, the thermal and viscous diffusion processes in the boundary layers in the slits and the cavity, the modal behaviour for the vibrating structure, and the non-uniformity of the acoustic field in the backing cavity which is modelled in using an integral formulation with a suitable Green's function. Benchmark solutions are proposed in terms of beam motion (from which the sensitivity, input impedance, and pressure transfer function can be calculated). A numerical implementation (FEM) is handled against which the analytical results are tested. The archived file is not the final published version of the article A. Novak, P. Honzik & M. Bruneau (2017), "Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: Analytical and numerical approach in a high frequency range, benchmark solutions"
Type de document :
Article dans une revue
Liste complète des métadonnées

Littérature citée [23 références]  Voir  Masquer  Télécharger

https://hal.archives-ouvertes.fr/hal-02504359
Contributeur : Antonin Novak <>
Soumis le : mardi 10 mars 2020 - 16:28:29
Dernière modification le : mardi 19 janvier 2021 - 10:30:09
Archivage à long terme le : : jeudi 11 juin 2020 - 15:36:34

Fichier

2017_JSV_poutre.pdf
Fichiers produits par l'(les) auteur(s)

Identifiants

Collections

Citation

Antonin Novak, Petr Honzík, Michel Bruneau. Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: Analytical and numerical approach in a high frequency range, benchmark solutions. Journal of Sound and Vibration, Elsevier, 2017, 401, pp.36-53. ⟨10.1016/j.jsv.2017.04.026⟩. ⟨hal-02504359⟩

Partager

Métriques

Consultations de la notice

90

Téléchargements de fichiers

237