Quantitative estimation of crazing in sol-gel layers by automated optical microscopy analysis

Abstract : This paper describes how to quantify the scattering that appears in thin films deposited on a flat substrate. The defects appear during the deposition process and are hard to identify from classical optical microscopy pictures due to their small surface and contrast. A new way to probe the microroughness of optical components is described for heterogeneous or large samples (cm2) that requires a statistical analysis of each image over a full mapping of the sample. Due to possible optical misalignment or surface waviness, an automatic adjustment of the optical focus plane was implemented for each image during the surface mapping. In this way, we could measure the scattering using a microscope set-up. The results are linked to diffuse reflection and transmission losses (extinction coefficient k) and several different contributions from the total scattering are identified.