Simulation/Experiment Confrontation, an Efficient Approach for Sensitive SAW Sensors Design

Bilel Achour (1) , Ghada Attia (2) , Chouki Zerrouki (2) , Najla Fourati (2) , Kosai Raoof (1) , Nourdin Yaakoubi (1)

1 LAUM - Laboratoire d'Acoustique de l'Université du Mans
2 SATIE - Systèmes et Applications des Technologies de l'Information et de l'Energie

Sensitivity is one of the most important parameters to put in the foreground in all sensing applications. Its increase is therefore an ongoing challenge, particularly for surface acoustic wave (SAW) sensors. Herein, finite element method (FEM) simulation using COMSOL Multiphysics software is first used to simulate the physical and electrical properties of SAW delay line. Results indicate that 2D configuration permits to accurately obtain all pertinent parameters, as in 3D simulation, with very substantial time saving. A good agreement between calculation and experiment, in terms of transfer functions (S21 spectra), was also shown to evaluate the dependence of the SAW sensors sensitivity on the operating frequency; 2D simulations have been conducted on 104 MHz and 208 MHz delay lines, coated with a polyisobutylene (PIB) as sensitive layer to dichloromethane (DCM). A fourfold increase in sensitivity was obtained by doubling frequency. Both sensors were then realized and tested as chem-sensors to detect zinc ions in liquid media. 9-{[4-({[4-(9anthrylmethoxy)phenyl]sulfanyl} methyl)]methyl] anthracene (TDP-AN) was selected as the sensing layer. Results show a comparable response curves for both designed sensors, in terms of limit of detection and dissociation constants K d values. On the other hand, experimental sensitivity values were of the order of [7.0 ± 2.8] × 10 8 [ ° /M] and [16.0 ± 7.6] × 10 8 [ ° /M] for 104 MHz and 208 MHz sensors, respectively, confirming that the sensitivity increases with frequency.

Mots clés: dissociation constants; surface acoustic wave (SAW) sensors; zinc ions; dichloromethane (DCM); anthracene; finite element method (FEM) simulation; polyisobutylene (PIB)

Domaines: Acoustique [physics.class-ph]; Micro et nanotechnologies/Microélectronique; Modélisation et simulation; Matériaux; Sciences de l'ingénieur [physics]; Chimie

Bilel Achour, Ghada Attia, Chouki Zerrouki, Najla Fourati, Kosai Raoof, et al.. Simulation/Experiment Confrontation, an Efficient Approach for Sensitive SAW Sensors Design. Sensors, 2020, 20 (17), pp.4994. ⟨10.3390/s20174994⟩. ⟨hal-02937130⟩