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From multilayers to V1-xWxO2±δ films elaborated by magnetron sputtering for decreasing thermochromic transition temperature

Abstract : W-doped monoclinic vanadium dioxide VO2(M) thin films with various W contents were successfully deposited by magnetron sputtering method. As-deposited films consisted of multilayers composed of VO2/W bilayers. Further annealing at 500 °C under Argon for 1 h led to crystallized and homogeneous V1-xWxO2±δ films. 200 nm films were characterized at room temperature by Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Besides, the films were analyzed by temperature-dependent infrared transmittance in the wavelength region 2–25 μm and the effects of W doping on thermochromic properties of VO2 were studied. The results show that the transition temperature gradually decreases with increasing W content. A transition temperature of 21 °C with a high infrared transmittance modulation (≈68%) was finally achieved with a W-doping level of 2.7 at.% which may indicate a strong potential for applications in optical devices as functional materials.
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Soumis le : jeudi 5 novembre 2020 - 16:00:32
Dernière modification le : mardi 1 décembre 2020 - 15:56:02

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Jean-Louis Victor, Corinne Marcel, Laurent Sauques, Christine Labrugère, Frederic Amiard, et al.. From multilayers to V1-xWxO2±δ films elaborated by magnetron sputtering for decreasing thermochromic transition temperature. Journal of Alloys and Compounds, Elsevier, 2020, pp.157658. ⟨10.1016/j.jallcom.2020.157658⟩. ⟨hal-02976017⟩

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